Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460351 | Electronically controlled cryopump | Donald A. Olsen | 2002-10-08 |
| 6461113 | Electronically controlled vacuum pump | Robert J. Lepofsky, Alan L. Weeks, Gerald J. Fortier, Stephen R. Matte, Martin Stein +1 more | 2002-10-08 |