Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465369 | Method for stabilizing semiconductor degas temperature | Ta-Te Chen, Chih-hung Shu, Chan-bin Ho | 2002-10-15 |
| 6387231 | Moving heaters disposed in a susceptor device in a masked sputtering chamber | Ching-Chao Wang | 2002-05-14 |