Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387231 | Moving heaters disposed in a susceptor device in a masked sputtering chamber | Tun-Ho Teng | 2002-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387231 | Moving heaters disposed in a susceptor device in a masked sputtering chamber | Tun-Ho Teng | 2002-05-14 |