Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380087 | CMP process utilizing dummy plugs in damascene process | Subhash Gupta, Mei Sheng Zhou | 2002-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380087 | CMP process utilizing dummy plugs in damascene process | Subhash Gupta, Mei Sheng Zhou | 2002-04-30 |