Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451687 | Intermetal dielectric layer for integrated circuits | Huang Liu, John Sudijono, Edwin Goh, Alan Cuthbertson, Arthur Ang +3 more | 2002-09-17 |
| 6403478 | Low pre-heat pressure CVD TiN process | Chim Seng Seet, Chyi S. Chern | 2002-06-11 |
| 6352904 | Alignment mark strategy for oxide CMP | Soon Ee Neoh | 2002-03-05 |