Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493288 | Wide frequency band micromachined capacitive microphone/hydrophone and method | Butrus T. Khuri-Yakub, Abdullah Atalar, Arif Sanli Ergun | 2002-12-10 |
| 6430109 | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections | Butrus T. Khuri-Yakub, Sam Calmes, Xuecheng Jin | 2002-08-06 |