Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6430109 | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections | Butrus T. Khuri-Yakub, F. Levent Degertekin, Sam Calmes | 2002-08-06 |