Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410770 | Chloride-free process for the production of alkylsilanes suitable for microelectronic applications | Youlin Pan, Gerald L. Larson | 2002-06-25 |
| 6346477 | Method of interlayer mediated epitaxy of cobalt silicide from low temperature chemical vapor deposition of cobalt | Alain E. Kaloyeros, Ana R. Londergan | 2002-02-12 |