Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6346477 | Method of interlayer mediated epitaxy of cobalt silicide from low temperature chemical vapor deposition of cobalt | Ana R. Londergan, Barry C. Arkles | 2002-02-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6346477 | Method of interlayer mediated epitaxy of cobalt silicide from low temperature chemical vapor deposition of cobalt | Ana R. Londergan, Barry C. Arkles | 2002-02-12 |