Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429098 | Process for obtaining a layer of single-crystal germanium or silicon on a substrate of single-crystal silicon or germanium, respectively, and multilayer products obtained | Daniel Bensahel, Yves Campidelli, Maurice Rivoire | 2002-08-06 |
| 6399502 | Process for fabricating a planar heterostructure | Yves Campidelli, Maurice Rivoire, Daniel Bensahel | 2002-06-04 |
| 6372581 | Process for nitriding the gate oxide layer of a semiconductor device and device obtained | Daniel Bensahel, Yves Campidelli, Francois Martin | 2002-04-16 |