Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429098 | Process for obtaining a layer of single-crystal germanium or silicon on a substrate of single-crystal silicon or germanium, respectively, and multilayer products obtained | Daniel Bensahel, Yves Campidelli, Caroline Hernandez | 2002-08-06 |
| 6399502 | Process for fabricating a planar heterostructure | Caroline Hernandez, Yves Campidelli, Daniel Bensahel | 2002-06-04 |
| 6386950 | Process for mechanical chemical polishing of layer of aluminium or aluminium alloy conducting material | Eric Jacquinot, Pascal Letourneau | 2002-05-14 |
| 6362108 | Composition for mechanical chemical polishing of layers in an insulating material based on a polymer with a low dielectric constant | Eric Jacquinot, Pascal Letourneau | 2002-03-26 |