Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441885 | Low thermal distortion extreme-UV lithography reticle | Steven Gianoulakis | 2002-08-27 |
| 6395455 | Low thermal distortion Extreme-UV lithography reticle and method | Steven Gianoulakis | 2002-05-28 |