Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441885 | Low thermal distortion extreme-UV lithography reticle | Avijit K. Ray-Chaudhuri | 2002-08-27 |
| 6395455 | Low thermal distortion Extreme-UV lithography reticle and method | Avijit K. Ray-Chaudhuri | 2002-05-28 |
| 6350310 | Crystal growth and annealing for minimized residual stress | — | 2002-02-26 |