Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492311 | Ethyenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal composition and process | Zhefei J. Chen | 2002-12-10 |
| 6417112 | Post etch cleaning composition and process for dual damascene system | Catherine M. Peyne, David J. Maloney, Shihying Lee, Leslie W. Arkless | 2002-07-09 |
| 6399551 | Alkanolamine semiconductor process residue removal process | — | 2002-06-04 |
| 6367486 | Ethylenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal process | Zhefei J. Chen | 2002-04-09 |