Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417112 | Post etch cleaning composition and process for dual damascene system | Catherine M. Peyne, David J. Maloney, Shihying Lee, Wai Mun Lee | 2002-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417112 | Post etch cleaning composition and process for dual damascene system | Catherine M. Peyne, David J. Maloney, Shihying Lee, Wai Mun Lee | 2002-07-09 |