Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411010 | Piezoelectric actuator | Kazuo Tani, Satoshi Watanabe, Tatsuru Sato | 2002-06-25 |
| 6364922 | Substrate transport container | Akira Tanaka, Kazuo Okubo | 2002-04-02 |
| 6362938 | Fine drive and positioning units and memory apparatus | Kazuo Tani, Hidetaka Maeda, Mizuaki Suzuki | 2002-03-26 |