Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500348 | Deep reactive ion etching process and microelectromechanical devices formed thereby | John C. Christenson | 2002-12-31 |
| 6428713 | MEMS sensor structure and microfabrication process therefor | John C. Christenson, Steven E. Staller, John E. Freeman, Robert Lawrence Healton, David B. Rich | 2002-08-06 |