Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500348 | Deep reactive ion etching process and microelectromechanical devices formed thereby | Troy Chase | 2002-12-31 |
| 6428713 | MEMS sensor structure and microfabrication process therefor | Steven E. Staller, John E. Freeman, Troy Chase, Robert Lawrence Healton, David B. Rich | 2002-08-06 |
| 6393914 | Angular accelerometer | Seyed R. Zarabadi, William J. Baney | 2002-05-28 |