Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482555 | Method of patterning sub-0.25&lgr; line features with high transmission, “attenuated” phase shift masks | J. Fung Chen, Tom Laidig, Kurt E. Wampler | 2002-11-19 |