Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482555 | Method of patterning sub-0.25&lgr; line features with high transmission, “attenuated” phase shift masks | Roger Caldwell, Tom Laidig, Kurt E. Wampler | 2002-11-19 |
| 6335130 | System and method of providing optical proximity correction for features using phase-shifted halftone transparent/semi-transparent features | John S. Petersen | 2002-01-01 |