Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475682 | Photolithography method, photolithography mask blanks, and method of making | Richard Sean Priestley, Chunzhe C. Yu | 2002-11-05 |
| 6410192 | Photolithography method, photolithography mask blanks, and method of making | Richard Sean Priestley, Chunzhe C. Yu | 2002-06-25 |
| 6403508 | Fused silica with constant induced absorption | Roger J. Araujo, Nicholas Francis Borrelli, Robert E. McLay, Charlene Marie Smith | 2002-06-11 |
| 6387511 | Light weight porous structure | Kenneth Edward Hrdina, Michael H. Wasilewski, C. Charles Yu | 2002-05-14 |