Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492072 | Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass | Lisa Anne Moore | 2002-12-10 |
| 6466365 | Film coated optical lithography elements and method of making | Robert Maier, Lisa Anne Moore | 2002-10-15 |
| 6403508 | Fused silica with constant induced absorption | Roger J. Araujo, Nicholas Francis Borrelli, Robert E. McLay, Daniel R. Sempolinski | 2002-06-11 |