Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416909 | Alternating phase shift mask and method for fabricating the alignment monitor | Shyue Fong Quek, Ting Cheong Ang, Sang Yee Loong | 2002-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416909 | Alternating phase shift mask and method for fabricating the alignment monitor | Shyue Fong Quek, Ting Cheong Ang, Sang Yee Loong | 2002-07-09 |