Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468853 | Method of fabricating a shallow trench isolation structure with reduced local oxide recess near corner | Yelehanka Ramachandramurthy Pradeep, Chivkula Subrahmanyam, Narayanan Balasubramanian | 2002-10-22 |