Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465157 | Dual layer pattern formation method for dual damascene interconnect | Mei Sheng Zhou, Subhash Gupta, Ming hui Far | 2002-10-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465157 | Dual layer pattern formation method for dual damascene interconnect | Mei Sheng Zhou, Subhash Gupta, Ming hui Far | 2002-10-15 |