Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483120 | Control system for a charged particle exposure apparatus | Masato Muraki | 2002-11-19 |
| 6466301 | Transfer apparatus and transfer method | Masato Muraki | 2002-10-15 |
| 6455211 | Pattern transfer method and apparatus, and device manufacturing method | Masato Muraki | 2002-09-24 |