Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483120 | Control system for a charged particle exposure apparatus | Yoshikiyo Yui | 2002-11-19 |
| 6472672 | Electron beam exposure apparatus and its control method | — | 2002-10-29 |
| 6472674 | Electron beam exposure system and method of manufacturing devices using the same | — | 2002-10-29 |
| 6466301 | Transfer apparatus and transfer method | Yoshikiyo Yui | 2002-10-15 |
| 6455211 | Pattern transfer method and apparatus, and device manufacturing method | Yoshikiyo Yui | 2002-09-24 |
| 6392243 | Electron beam exposure apparatus and device manufacturing method | — | 2002-05-21 |
| 6337485 | Electron beam exposure apparatus and its control method | — | 2002-01-08 |