Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414742 | Stage apparatus, and exposure apparatus and device manufacturing method using the same | Nobushige Korenaga | 2002-07-02 |
SY
Shuichi Yabu
Overall (2002): #116,445 of 266,432Top 45%
1
Patents 2002