Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479991 | Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage | — | 2002-11-12 |
| 6426788 | Stage device and exposure apparatus using the same | — | 2002-07-30 |
| 6414742 | Stage apparatus, and exposure apparatus and device manufacturing method using the same | Shuichi Yabu | 2002-07-02 |
| 6359677 | Stage apparatus, exposure apparatus using the same, and a device manufacturing method | Hiroshi Itoh | 2002-03-19 |