Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477908 | Pedestal with vibration sensor, and exposure apparatus having the same | — | 2002-11-12 |
| 6473159 | Anti-vibration system in exposure apparatus | Michio Yanagisawa, Takehiko Mayama | 2002-10-29 |
| 6448723 | Stage system and exposure apparatus | — | 2002-09-10 |
| 6378672 | Active vibration isolation device and its control method | — | 2002-04-30 |
| 6359688 | Projection exposure apparatus and method of controlling same | Satoshi Akimoto, Shigeyuki Uzawa | 2002-03-19 |