Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493062 | Driving apparatus and exposure apparatus | Yukio Tokuda, Nobuyoshi Deguchi, Yukio Takabayashi, Hiromichi Hara | 2002-12-10 |
| 6473158 | Exposure method and exposure apparatus | — | 2002-10-29 |
| 6359688 | Projection exposure apparatus and method of controlling same | Satoshi Akimoto, Shinji Wakui | 2002-03-19 |
| 6342703 | Exposure apparatus, exposure method, and device manufacturing method employing the exposure method | Shinichiro Koga | 2002-01-29 |
| 6342942 | Exposure apparatus, exposure control method, and device fabrication method using the exposure apparatus | — | 2002-01-29 |