Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454920 | Magnetron sputtering source | Pius Grunenfelder, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer | 2002-09-24 |
| 6337001 | Process for sputter coating, a sputter coating source, and sputter coating apparatus with at least one such source | Pius Gruenenfelder | 2002-01-08 |