Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6337001 | Process for sputter coating, a sputter coating source, and sputter coating apparatus with at least one such source | Walter Haag | 2002-01-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6337001 | Process for sputter coating, a sputter coating source, and sputter coating apparatus with at least one such source | Walter Haag | 2002-01-08 |