Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444135 | Method to make gas permeable shell for MEMS devices with controlled porosity | Murali Hanabe | 2002-09-03 |
| 6440253 | Method to facilitate processing of three dimensional substrates | — | 2002-08-27 |