Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444135 | Method to make gas permeable shell for MEMS devices with controlled porosity | Risaku Toda | 2002-09-03 |
| 6432330 | Jet system for spherical shape devices | Nainesh J. Patel | 2002-08-13 |
| 6426280 | Method for doping spherical semiconductors | Evangellos Vekris, Nainesh J. Patel | 2002-07-30 |
| 6383287 | System and method for performing diffusion on a three-dimensional substrate | Nainesh J. Patel, Michael Kelly Perdue | 2002-05-07 |
| 6365493 | Method for antimony and boron doping of spherical semiconductors | Evangellos Vekris, Nainesh J. Patel | 2002-04-02 |