Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491757 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2002-12-10 |
| 6464792 | Process chamber with downstream getter plate | John F. Wengert, Loren Jacobs, Michael Halpin, Derrick W. Foster, Cornelius A. van der Jeugd +1 more | 2002-10-15 |
| 6454866 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2002-09-24 |
| 6343183 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2002-01-29 |