Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491757 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-12-10 |
| 6464792 | Process chamber with downstream getter plate | John F. Wengert, Loren Jacobs, Michael Halpin, Derrick W. Foster, Robert Vyne +1 more | 2002-10-15 |
| 6454866 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-09-24 |
| 6343183 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-01-29 |
| 6335280 | Tungsten silicide deposition process | — | 2002-01-01 |