Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500266 | Heater temperature uniformity qualification tool | Henry Ho, Alexander M. Rubinchik, Aihua Chen, Abril Cabreros, Steven T. Li +1 more | 2002-12-31 |
| 6424880 | Multi-computer chamber control system, method and medium | Alexey Goder | 2002-07-23 |
| 6406179 | Sensor for measuring a substrate temperature | Bruce E. Adams, Aaron Muir Hunter, Alex Rubinchik, Paul A. O'Brien | 2002-06-18 |
| 6345909 | Apparatus for infrared pyrometer calibration in a thermal processing system | — | 2002-02-12 |