Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406179 | Sensor for measuring a substrate temperature | Aaron Muir Hunter, Alex Rubinchik, Mark Yam, Paul A. O'Brien | 2002-06-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406179 | Sensor for measuring a substrate temperature | Aaron Muir Hunter, Alex Rubinchik, Mark Yam, Paul A. O'Brien | 2002-06-18 |