Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435942 | Chemical mechanical polishing processes and components | Raymond R. Jin, Fred C. Redeker, Thomas H. Osterheld | 2002-08-20 |
| 6361405 | Utility wafer for chemical mechanical polishing | Benjamin A. Bonner, Thomas H. Osterheld, Sidney P. Huey | 2002-03-26 |