Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488984 | Film deposition method and apparatus | Yuichi Wada, Hiroyuki Yarita, Naomi Yoshida | 2002-12-03 |
| 6440282 | Sputtering reactor and method of using an unbalanced magnetron | Yuichi Wada, Kihwan Yoon | 2002-08-27 |