Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494766 | Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing | Wallter Waiter Schoenleber, Boguslaw A. Swedek | 2002-12-17 |
AW
Andreas Norbert Wiswesser
Overall (2002): #253,226 of 266,432Top 100%
1
Patents 2002