Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462482 | Plasma processing system for sputter deposition applications | Sunil Wickramanayaka | 2002-10-08 |
| 6376796 | Plasma processing system | Noriyoshi Sato, Satoru Iizuka, Tsukasa Yoneyama, Hiroyasu Sato, Unryu Ogawa +2 more | 2002-04-23 |
| 6339997 | Plasma processing apparatus | Ken'ichi Takagi | 2002-01-22 |