Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439963 | System and method for mitigating wafer surface disformation during chemical mechanical polishing (CMP) | Bharath Rangarajan, Bhanwar Singh | 2002-08-27 |
| 6362052 | Use of an etch to reduce the thickness and around the edges of a resist mask during the creation of a memory cell | Bharath Rangarajan, Fei Wang, George J. Kluth | 2002-03-26 |