Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452412 | Drop-in test structure and methodology for characterizing an integrated circuit process flow and topography | Iraj Emami, Charles E. May | 2002-09-17 |
| 6429452 | Test structure and methodology for characterizing ion implantation in an integrated circuit fabrication process | — | 2002-08-06 |
| 6362634 | Integrated defect monitor structures for conductive features on a semiconductor topography and method of use | Michael G. McIntyre | 2002-03-26 |