Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479411 | Method for forming high quality multiple thickness oxide using high temperature descum | Angela T. Hui | 2002-11-12 |
| 6461973 | Method for forming high quality multiple thickness oxide layers by reducing descum induced defects | Angela T. Hui | 2002-10-08 |
| 6432618 | Method for forming high quality multiple thickness oxide layers by reducing descum induced defects | Angela T. Hui | 2002-08-13 |