Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486036 | Method and apparatus for process control of alignment in dual damascene processes | Gregory B. Starnes | 2002-11-26 |
| 6468889 | Backside contact for integrated circuit and method of forming same | John A. Iacoponi | 2002-10-22 |
| 6448099 | Method and apparatus for detecting voltage contrast in a semiconductor wafer | John A. Iacoponi, Tom Spikes, Jr. | 2002-09-10 |