Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441398 | Algorithm for detecting sloped contact holes using a critical-dimension waveform | Jean Y. Yang, Khoi A. Phan | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441398 | Algorithm for detecting sloped contact holes using a critical-dimension waveform | Jean Y. Yang, Khoi A. Phan | 2002-08-27 |