Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452408 | Impedance measurement tool | Akira Nakano, Koichi Fukuda, Tadahiro Ohmi | 2002-09-17 |
| 6349670 | Plasma treatment equipment | Akira Nakano, Koichi Fukuda, Sung-Chul Kim, Yasuhiko Kasama, Tadahiro Ohmi | 2002-02-26 |