Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500489 | Low temperature CVD processes for preparing ferroelectric films using Bi alcoxides | Frank Hintermaier, Jeffrey F. Roeder, Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers | 2002-12-31 |
| 6395194 | Chemical mechanical polishing compositions, and process for the CMP removal of iridium thin using same | Michael W. Russell, Jonathan Wolk, George E. Emond | 2002-05-28 |
| 6346741 | Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same | Michael W. Russell, Steven M. Bilodeau, Thomas H. Baum | 2002-02-12 |
| 6342711 | Confinement of E-fields in high density ferroelectric memory device structures | Steven M. Bilodeau | 2002-01-29 |